v3.25.3

Document And Entity Information	Nov. 19, 2025
Cover [Abstract]
Document Type	8-K
Amendment Flag	false
Document Period End Date	Nov. 19, 2025
Entity Registrant Name	Onto Innovation Inc.
Entity Central Index Key	0000704532
Entity Emerging Growth Company	false
Entity File Number	001-39110
Entity Incorporation, State or Country Code	DE
Entity Tax Identification Number	94-2276314
Entity Address, Address Line One	16 Jonspin Road
Entity Address, City or Town	Wilmington
Entity Address, State or Province	MA
Entity Address, Postal Zip Code	01887
City Area Code	(978)
Local Phone Number	253-6200
Entity Information, Former Legal or Registered Name	Not applicable
Written Communications	false
Soliciting Material	false
Pre-commencement Tender Offer	false
Pre-commencement Issuer Tender Offer	false
Title of 12(b) Security	Common Stock, $0.001 par value per share
Trading Symbol	ONTO
Security Exchange Name	NYSE

Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.

+ References

No definition available.

+ Details

Name:	dei_AmendmentFlag
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Area code of city

+ References

No definition available.

+ Details

Name:	dei_CityAreaCode
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

Cover page.

+ References

No definition available.

+ Details

Name:	dei_CoverAbstract
Namespace Prefix:	dei_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD.

+ References

No definition available.

+ Details

Name:	dei_DocumentPeriodEndDate
Namespace Prefix:	dei_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

- Definition

The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.

+ References

No definition available.

+ Details

Name:	dei_DocumentType
Namespace Prefix:	dei_
Data Type:	dei:submissionTypeItemType
Balance Type:	na
Period Type:	duration

- Definition

Address Line 1 such as Attn, Building Name, Street Name

+ References

No definition available.

+ Details

Name:	dei_EntityAddressAddressLine1
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

Name of the City or Town

+ References

No definition available.

+ Details

Name:	dei_EntityAddressCityOrTown
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

Code for the postal or zip code

+ References

No definition available.

+ Details

Name:	dei_EntityAddressPostalZipCode
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

Name of the state or province.

+ References

No definition available.

+ Details

Name:	dei_EntityAddressStateOrProvince
Namespace Prefix:	dei_
Data Type:	dei:stateOrProvinceItemType
Balance Type:	na
Period Type:	duration

- Definition

A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection b-2

+ Details

Name:	dei_EntityCentralIndexKey
Namespace Prefix:	dei_
Data Type:	dei:centralIndexKeyItemType
Balance Type:	na
Period Type:	duration

- Definition

Indicate if registrant meets the emerging growth company criteria.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection b-2

+ Details

Name:	dei_EntityEmergingGrowthCompany
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.

+ References

No definition available.

+ Details

Name:	dei_EntityFileNumber
Namespace Prefix:	dei_
Data Type:	dei:fileNumberItemType
Balance Type:	na
Period Type:	duration

- Definition

Two-character EDGAR code representing the state or country of incorporation.

+ References

No definition available.

+ Details

Name:	dei_EntityIncorporationStateCountryCode
Namespace Prefix:	dei_
Data Type:	dei:edgarStateCountryItemType
Balance Type:	na
Period Type:	duration

- Definition

Former Legal or Registered Name of an entity

+ References

No definition available.

+ Details

Name:	dei_EntityInformationFormerLegalOrRegisteredName
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection b-2

+ Details

Name:	dei_EntityRegistrantName
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection b-2

+ Details

Name:	dei_EntityTaxIdentificationNumber
Namespace Prefix:	dei_
Data Type:	dei:employerIdItemType
Balance Type:	na
Period Type:	duration

- Definition

Local phone number for entity.

+ References

No definition available.

+ Details

Name:	dei_LocalPhoneNumber
Namespace Prefix:	dei_
Data Type:	xbrli:normalizedStringItemType
Balance Type:	na
Period Type:	duration

- Definition

Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 13e
-Subsection 4c

+ Details

Name:	dei_PreCommencementIssuerTenderOffer
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 14d
-Subsection 2b

+ Details

Name:	dei_PreCommencementTenderOffer
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Title of a 12(b) registered security.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection b

+ Details

Name:	dei_Security12bTitle
Namespace Prefix:	dei_
Data Type:	dei:securityTitleItemType
Balance Type:	na
Period Type:	duration

- Definition

Name of the Exchange on which a security is registered.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 12
-Subsection d1-1

+ Details

Name:	dei_SecurityExchangeName
Namespace Prefix:	dei_
Data Type:	dei:edgarExchangeCodeItemType
Balance Type:	na
Period Type:	duration

- Definition

Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Exchange Act
-Number 240
-Section 14a
-Subsection 12

+ Details

Name:	dei_SolicitingMaterial
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Trading symbol of an instrument as listed on an exchange.

+ References

No definition available.

+ Details

Name:	dei_TradingSymbol
Namespace Prefix:	dei_
Data Type:	dei:tradingSymbolItemType
Balance Type:	na
Period Type:	duration

- Definition

Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Securities Act
-Number 230
-Section 425

+ Details

Name:	dei_WrittenCommunications
Namespace Prefix:	dei_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

ONTO INNOVATION INC. 8-K