4//SEC Filing
AXCELIS TECHNOLOGIES INC 4
Accession 0001181431-13-044303
$ACLSCIK 0001113232operating
Filed
Aug 12, 8:00 PM ET
Accepted
Aug 13, 9:58 AM ET
Size
5.8 KB
Accession
0001181431-13-044303
Documents
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 4
- Filed
- Aug 12, 8:00 PM ET
- Accepted
- Aug 13, 9:58 AM ET
- Size
- 5.8 KB