3//SEC Filing
AXCELIS TECHNOLOGIES INC 3
Accession 0001181431-05-045259
$ACLSCIK 0001113232operating
Filed
Aug 7, 8:00 PM ET
Accepted
Aug 8, 3:45 PM ET
Size
6.0 KB
Accession
0001181431-05-045259
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 3
- Filed
- Aug 7, 8:00 PM ET
- Accepted
- Aug 8, 3:45 PM ET
- Size
- 6.0 KB