SC 13G/A//SEC Filing
AXCELIS TECHNOLOGIES INC SC 13G/A
Accession 0001133527-04-000005
$ACLSCIK 0001113232operating
Filed
Jan 8, 7:00 PM ET
Accepted
Jan 9, 10:19 AM ET
Size
23.1 KB
Accession
0001133527-04-000005
Documents
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- SC 13G/A
- Filed
- Jan 8, 7:00 PM ET
- Accepted
- Jan 9, 10:19 AM ET
- Size
- 23.1 KB