UNITED STATES
SECURITIES AND EXCHANGE COMMISSION

Washington, ~~D.C.~~DC 20549

FORM 8-K

CURRENT REPORT
Pursuant to Section 13 or 15(d) of the
Securities Exchange Act of 1934

Date of Report (Date of earliest event reported): ~~February~~May 111, 2007

THERMA-WAVE, INC.

(Exact name of ~~registrant~~Registrant as ~~specified~~Specified in ~~its charter~~Charter)

Delaware	000-26911	94-3000561
(State or other	(Commission File Number)	(IRS Employer Identification No.)
jurisdiction of
incorporation)


Delaware (State or Other Jurisdiction of Incorporation)		000-26911 (Commission File Number)		94-3000561 (IRS Employer Identification No.)

1250 Reliance Way Fremont, California 94539 (Address of principal executive offices~~, including Zip Code~~) ~~(510) 668-2200 (Registrant’s telephone number, including area code) Not Applicable (Former name or former address, if changed since last report)~~

~~Check~~Registrant’s ~~the~~telephone ~~appropriate~~number, ~~box~~including ~~below~~area ifcode: ~~the Form 8~~(510) 668-~~K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:~~ 2200

oCheck ~~Written~~the ~~communications~~appropriate ~~pursuant~~box below if the Form 8-K filing is intended to ~~Rule 425~~simultaneously satisfy the filing obligation of the registrant under any of the ~~Securities~~following ~~Act~~provisions (17see ~~CFR~~General Instruction ~~230~~A.~~425~~2. below):

o Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425) o Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12) o Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b)) o Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

o Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))

o Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

TABLE OF CONTENTS

	ITEM 2.02 Results of Operations and Financial Condition
	ITEM 8.01 Other Events.
	ITEM 9.01 Financial Statements and Exhibits
	ITEM 9.01. FINANCIAL STATEMENTS AND EXHIBITS.
SIGNATURES
SIGNATURE
EXHIBIT INDEX
EXHIBIT TABLE
EXHIBIT 99.1

ITEM 28.0201 ~~Results~~Other ~~of Operations and Financial Condition~~Events.

On ~~February~~May 111, 2007, Therma-Wave, Inc., a Delaware corporation (the “Company”), issued a press release announcing ~~its~~that ~~financial~~KLA-Tencor ~~results~~Corporation, a Delaware corporation (“KLA-Tencor”), and the Company ~~for~~received written approval from the ~~fiscal~~German ~~third~~Federal ~~quarter~~Cartel ~~ended~~Office ~~December 31,~~(“FCO”) ~~2006.~~for Athe ~~copy~~acquisition by KLA-Tencor of ~~this~~the ~~press~~Company ~~release~~shares ispursuant ~~attached~~to ~~as Exhibit 99~~the previously announced tender offer.1 ~~and~~The isFCO approval ~~incorporated~~was bythe ~~reference~~final ~~into~~regulatory ~~this~~clearance ~~Item 2~~necessary to proceed with the acquisition of the Company by KLA-Tencor.~~02.~~

~~ITEM~~The ~~9.01~~foregoing ~~Financial~~description ~~Statements~~of the press release does not purport to be complete and ~~Exhibits~~is qualified in its entirety by reference to the complete text of the press release, which is filed as Exhibit 99.1 hereto and is incorporated herein by reference in its entirety.

~~(c) Exhibits~~ITEM 9.01. FINANCIAL STATEMENTS AND EXHIBITS.

Exhibit
No.		Description
99.1		Press Release dated February 1, 2007

(d) Exhibits.


Exhibit
Number		Description
99.1		Press Release issued by Therma-Wave, Inc., dated May 11, 2007.

~~SIGNATURES~~SIGNATURE

Pursuant to the requirements of the Securities Exchange Act of 1934, ~~the~~as amended, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.

	THERMA-WAVE, INC.
Date: May 11, 2007	THERMA-WAVE, INC.
Date: February 1, 2007	/s/ Joseph J. Passarello
	/s/ Joseph J. Passarello
	Name:	Joseph J. Passarello
	Title:	Senior Vice President and Chief Financial Officer

EXHIBIT ~~INDEX~~TABLE

Exhibit
No.		Description
Number		Description
99.1		Press Release issued by Therma-Wave, Inc., dated ~~February~~May 111, 2007.

Table of Contents

Table of Contents

Table of Contents

Table of Contents

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