4//SEC Filing
AXCELIS TECHNOLOGIES INC 4
Accession 0001181431-13-035647
$ACLSCIK 0001113232operating
Filed
Jun 18, 8:00 PM ET
Accepted
Jun 19, 9:32 AM ET
Size
8.6 KB
Accession
0001181431-13-035647
Documents
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 4
- Filed
- Jun 18, 8:00 PM ET
- Accepted
- Jun 19, 9:32 AM ET
- Size
- 8.6 KB